Experimental Study of the Method of X-ray Phase-Contrast Microscopy Using a Nanofocusing Lens at KISI-Kurchatov synchrotron source

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Abstract

The results of an experimental study at the KISI-Kurchatov synchrotron source of a new phase-contrast imaging scheme for micro-objects using a nanofocusing compound refractive lens are presented. Visualization with submicron spatial resolution of a Fresnel zone plate, with the width of outer zones less than 0.5 µm, has been demonstrated. It was found that in the conducted experiments the main contribution to the instrumental function, which limits spatial resolution, is due to the vibrations of the optical scheme elements. The possibility of using the proposed scheme to determine the beam transverse size at the focus of the compound refractive lens, considering the instrumental function, is shown.

About the authors

M. S. Folomeshkin

National Research Centre "Kurchatov Institute"

Author for correspondence.
Email: folmaxim@gmail.com
Russian Federation, Moscow

V. G. Kohn

National Research Centre "Kurchatov Institute"

Email: folmaxim@gmail.com
Russian Federation, Moscow

A. Yu. Seregin

National Research Centre "Kurchatov Institute"

Email: folmaxim@gmail.com
Russian Federation, Moscow

Yu. A. Volkovsky

National Research Centre "Kurchatov Institute"

Email: folmaxim@gmail.com
Russian Federation, Moscow

P. A. Prosekov

National Research Centre "Kurchatov Institute"

Email: folmaxim@gmail.com
Russian Federation, Moscow

V. A. Yunkin

Institute of Microelectronics Technology and High-Purity Materials RAS

Email: folmaxim@gmail.com
Russian Federation, Chernogolovka

A. A. Snigirev

Immanuel Kant Baltic Federal University

Email: folmaxim@gmail.com
Russian Federation, Kaliningrad

Yu. V. Pisarevsky

National Research Centre "Kurchatov Institute"

Email: folmaxim@gmail.com
Russian Federation, Moscow

A. E. Blagov

National Research Centre "Kurchatov Institute"

Email: folmaxim@gmail.com
Russian Federation, Moscow

M. V. Kovalchuk

National Research Centre "Kurchatov Institute"

Email: folmaxim@gmail.com
Russian Federation, Moscow

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