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卷 52, 编号 1 (2023)
Параметры газовой фазы и кинетика реактивно-ионного травления SiO2 в плазме CF4/C4F8/Ar/He
Ефремов А., Kwon K.
PDF
(Rus)
卷 52, 编号 1 (2023)
Электрофизические характеристики и эмиссионные спектры плазмы тетрафторметана
Мурин Д., Пивоваренок С., Чесноков И., Гогулев И.
PDF
(Rus)
卷 52, 编号 1 (2023)
Controlling Silicon Etching Parameters in RF CHF3 Plasma by Optical Emission Spectroscopy
Murin D., Chesnokov I., Pivovarenok S., Efremov A.
PDF
(Rus)
卷 52, 编号 4 (2023)
Concentration of Fluorine Atoms and Kinetics of Reactive-Ion Etching of Silicon in CF4 + O2, CHF3 + O2, and C4F8 + O2 Mixtures
Efremov A., Bobylev A., Kwon K.
PDF
(Rus)
卷 52, 编号 5 (2023)
The Influence of Small F2, H2, and HF Additives on the Concentration of Active Particles in Tetrafluoromethane Plasma
Efremov A., Smirnov S., Betelin V.
PDF
(Rus)
卷 53, 编号 1 (2024)
Parameters and Composition of Plasma in a Mixture of CF4 + H2 + Ar: Effect of the CF4/H2 Ratio
Miakonkikh A., Kuzmenko V., Efremov A., Rudenko K.
PDF
(Rus)
卷 53, 编号 6 (2024)
Plasma Parameters and Si/SiO2 Etching Kinetics in Mixtures of Fluorocarbon Gases with Argon and Helium
Efremov A., Betelin V., Kwon K.
PDF
(Rus)
卷 53, 编号 3 (2024)
Influence of Hydrogen Additive on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane Plasma
Murin D., Grazhdyan A., Chesnokov I., Gogulev I.
PDF
(Rus)
卷 53, 编号 6 (2024)
Gas Phase Composition and Fluorine Atom Kinetics in SF6 Plasma
Myakonkikh A., Kuzmenko V., Efremov A., Rudenko K.
PDF
(Rus)
卷 53, 编号 4 (2024)
Plasmochemical and Reactive Ion Etching of Gallium Arsenide in Difluorodichloromethane with Helium
Murin D., Chesnokov I., Gogulev I., Anokhin A., Moloskin A.
PDF
(Rus)
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