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Study of the Influence of Ion-Beam Etching on the Surface Roughness of Single-Crystal Sapphire
Mikhailenko M.S., Pestov A.E., Zorina M.V., Chernyshev A.K., Chkhalo N.I., Shevchuk I.E.
Self-Forming Silicon Nitride Nanomask and Its Applications
Smirnov V.K., Kibalov D.S., Lepshin P.A., Zhuravlev I.V., Smirnova G.F.
Ion implantation: nanoporous germanium
Stepanov A.L., Nuzhdin V.I., Valeev V.F., Rogov А.М., Konovalov D.А.
Modification and Sputtering of Inhomogeneous Multilayer Oxidized Metal Films by Low-Current Argon Ion Beams
Lukiantsev D.S., Lubenchenko A.V., Ivanov D.A., Pavolotsky A.B., Lubenchenko O.I., Ivanova I.V., Pavlov O.N.
Radiation-stimulated processes under interaction of ions with porous structures
Nikiforova N.N., Oksengendler B.L., Ashurov K.B., Kutlimurotov B.R., Maksimov S.Е., Galkina О.А.
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