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The Effect of Copper Content on the Formation of Silicon Suboxides Phases in Cu–Si Films Obtained by Ion-Beam Sputtering
Barkov K.A., Terekhov V.A., Kersnovsky E.S., Polshin I.V., Ivkov S.A., Chukavin A.I., Rodivilov S.V., Buylov N.S., Nesterov D.N., Pobedinsky V.V., Pelagina A.K., Moiseev K.M., Nikonov A.E., Sitnikov A.V.
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