Determination of the Ion—Solid Interaction Potential from the Experiment and Its Influence on the Profiles of Implanted Particles
- Авторлар: Zinoviev A.N.1, Babenko P.Y.1, Mikhailov V.S.1, Tensin D.S.1
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Мекемелер:
- Ioffe Institute of Physics and Technical Sciences
- Шығарылым: № 6 (2024)
- Беттер: 38-43
- Бөлім: Articles
- URL: https://permmedjournal.ru/1028-0960/article/view/664806
- DOI: https://doi.org/10.31857/S1028096024060059
- EDN: https://elibrary.ru/DVQGTR
- ID: 664806
Дәйексөз келтіру
Аннотация
Based on the analysis of the angular distributions of particles passing through thin gold films, the parameters of the potential that best describes the experiment are obtained. The resulting potential differs from the potential describing collisions in the gaseous phase by a noticeable change in the screening constant. The influence of the collision energy, the choice of potential, and the model of electron bremsstrahlung on the depth distribution of implanted particles is analyzed.
Авторлар туралы
A. Zinoviev
Ioffe Institute of Physics and Technical Sciences
Хат алмасуға жауапты Автор.
Email: zinoviev@inprof.ioffe.ru
Ресей, Saint Petersburg
P. Babenko
Ioffe Institute of Physics and Technical Sciences
Email: zinoviev@inprof.ioffe.ru
Ресей, Saint Petersburg
V. Mikhailov
Ioffe Institute of Physics and Technical Sciences
Email: zinoviev@inprof.ioffe.ru
Ресей, Saint Petersburg
D. Tensin
Ioffe Institute of Physics and Technical Sciences
Email: zinoviev@inprof.ioffe.ru
Ресей, Saint Petersburg
Әдебиет тізімі
- Moliere G. // Z. Naturforsch. A 1947. V. 2. P. 133. https://doi.org./10.1515/zna-1947-0302
- Ziegler J.F., Biersack J.P., Littmark U. The Stopping and Range of Ions in Solids, the Stopping and Range of Ions in Matter, V. 1. New York: Pergamon, 1985, 321p.
- Lenz W. // Z. Phys. 1932. V. 77. P. 713. https://doi.org./10.1007/BF01342150
- Jensen H. // Z. Phys. 1932. V. 77. P. 722. https://doi.org./10.1007/BF01342151
- Wilson W.D., Haggmark L.G., Biersack J.P. // Phys. Rev. B 1977. V. 15. P. 2458. https://doi.org./10.1103/PhysRevB.15.2458
- Zinoviev A.N. // Nucl. Instrum. Methods Phys. Res., Sect. B 2011. V. 269. P. 829. https://doi.org./10.1016/j.nimb.2010.11.074
- Zinoviev A.N., Nordlund K. // Nucl. Instrum. Methods Phys. Res., Sect. B 2017. V. 406. P. 511. https://doi.org./10.1016/j.nimb.2017.03.047
- Meluzova D.S., Babenko P.Yu., Shergin A.P., Nordlund K., Zinoviev A.N. // Nucl. Instrum. Methods Phys. Res., Sect. B 2019. V. 460. P. 4. https://doi.org./10.1016/j.nimb.2019.03.037
- Zinoviev A.N., Babenko P.Yu., Nordlund K. // Nucl. Instrum. Methods Phys. Res., Sect. B 2021. V. 508. P. 10. https://doi.org./10.1016/j.nimb.2021.10.001
- Agrawal A., Mishra R., Ward L., Flores K.M., Windl W. // Modelling Simul. Mater. Sci. Eng. 2013. V. 21. P. 085001. https://doi.org./10.1088/0965-0393/21/8/085001
- Bjorkas C., Juslin N., Timko H., Vortler K., Nordlund K., Henriksson K., Erhart P. // J. Phys.: Condens. Matter 2009. V. 21. P. 445002. https://doi.org./10.1088/0953-8984/21/44/445002
- Marinica M-C., Ventelon L., Gilbert M.R., Proville L., Dudarev S.L., Marian J., Bencteux G., Willaime F. // J. Phys.: Condens. Matter 2013. V. 25. P. 395502. https://doi.org./10.1088/0953-8984/25/39/395502
- Bruckner B., Strapko T., Sortica M.A., Bauer P., Primetzhofer D. // Nucl. Instrum. Methods Phys. Res., Sect. B 2020. V. 470. P. 21. https://doi.org./10.1016/j.nimb.2020.02.018
- Бабенко П.Ю., Мелузова Д.С., Солоницына А.П., Шергин А.П., Зиновьев А.Н. // ЖЭТФ 2019. Т. 155. С. 612. https://doi.org./10.1134/S0044451019040047
- Бабенко П.Ю., Зиновьев А.Н., Тенсин Д.С. // ЖТФ. 2022. Т. 92. С. 1643. https://doi.org./10.21883/JTF.2022.11.53436.151-22
- NDS – Database. https://www-nds.iaea.org
- Blume R., Eckstein W., Verbeek H. // Nucl. Instr. Meth. 1980. V. 168. P. 57. https://doi.org./10.1016/0029-554X(80)91231-8
- Morita K., Akimune H., Suita T. // J. Phys. Soc. Japan 1968. V. 25. P. 1525. https://doi.org./10.1143/JPSJ.25.1525
- Archubi C.D., Eckardt J.C., Lantschner G.H., Arista N.R. // Phys. Rev. A 2006. V. 73. P. 042901. https://doi.org./10.1103/PhysRevA.73.042901
- Valdes J.E., Martínez-Tamayo G., Lantschner G.H., Eckardt J.C., Arista N.R. // Nucl. Instr. Meth. Phys. Res. B 1993. V. 73. P. 313. https://doi.org./10.1016/0168-583X(93)95744-P
- Markin S.N., Primetzhofer D., Prusa S., Brunmayr M., Kowarik G., Aumayr F., Bauer P. // Phys. Rev. B 2008. V. 78. P. 195122. https://doi.org./10.1103/PhysRevB.78.195122
- Fama M., Lantschner G.H., Eckardt J.C., Denton C.D., Arista N.R. // Nucl. Instr. Meth. Phys. Res. B 2000. V. 164-165. P. 241. https://doi.org./10.1016/S0168-583X(99)01086-1
- Andersen H.H., Csete A., Ichioka T., Knudsen H., Moller S.P., Uggerhoj U.I. // Nucl. Instr. Meth. Phys. Res. B 2002. V. 194. P. 217. https://doi.org./10.1016/S0168-583X(02)00692-4
- Зиновьев А.Н., Бабенко П.Ю. // ПЖЭТФ 2022. Т. 115. С. 603. https://doi.org./10.31857/S1234567822090105
- SRIM — The Stopping and Range of Ions in Matter — code. http://srim.org.
- Мелузова Д.С., Бабенко П.Ю., Шергин А.П., Зиновьев А.Н. // Поверхность 2019. В. 4. С. 74. https://doi.org./10.1134/S0207352819040127
- Бабенко П.Ю., Зиновьев А.Н., Михайлов В.С., Тенсин Д.С., Шергин А.П. // ПЖТФ. 2022. Т. 48. С. 10. https://doi.org./10.21883/PJTF.2022.14.52862.19231
- Firsov O.B. // Sov. Phys. JETP 1958. V. 7. P. 308.
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